• 微纳米操纵机械手 MicroManipulators

    MM3A微纳米操纵机械手 MM3A Series

    微纳操纵机械手 MM3A-EM

    微纳操纵机械手 MM3A-LMP

    微纳操纵机械手 MM3A-LS

    微纳操纵机械手 MM3E-EM

    微纳米操纵机械手插件 Plug-ins for Micromanipulators

    MGS2-EM微镊子

    MTW-EM 大微镊子

    微弱力测量装置 Force Measurement System

    绕臂旋转功能插件 Rotational Tip

    微弱电流测量屏蔽装置 Low-Current Measurement Kit

    显微焊接装置 Micro Soldering Unit

    气体注入电子束诱导沉积功能(GIS)

    MIS-EM 微注入插件系统

    SEM 样品子台 SEM Stages

    显微加热台

    显微加热制冷台

    XYZ-12830高精度闭环平移样品台

    E5AT 压电陶瓷五轴台

    TEM样品提取专用设备 Dedicated Tools for TEM samples” Pick-up

    LOS TEM样品提取专用设备

    低温冷冻TEM样品提取专用设备

    联用扫描电镜的原子力显微镜力 Super-flat AFM for SEM

    EBIC/EBAC成像模块 EBIC/EBAC Imaging Module 

    扫描电镜联用AFM

    纳米车床 (Nanolathe)

    其它 Others

    RT-STEM Rotational Axis(旋转轴)

    PS4 科研系列简版

    PW8.4-8  探针台系列

    PS探针台系列 PS Series

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PS探针台系列微纳米操纵机械手

PS(probe shuttle系列微纳米操纵仪是最新为装有空气锁(Air-Lock)的扫描及双束电镜设计的,微纳米操纵仪可以像扫描电镜样品一样经过预抽后进入到扫描电镜中,从而在不打开电镜舱门的情况下进行样品或探针更换。

此系列分为科研和半导体用两类,一般科研用仅操纵仪及相关的适配托盘平台即可(PS4)。

PS4可以根据需要配备2-4个MM4新一代微纳米操纵仪即:PS2、PS3、PS4。

Technical specifications

Dimensions Prober Shuttle Platform

ƒ Diameter 100 mm

ƒ Height 10 mm

Substage

ƒ Travel X and Y 9 mm

ƒ Travel Z 0.7 mm

Probers

ƒ Travel X 9 mm

ƒ Travel Y 5 mm

ƒ Travel Z 90 deg

All axes

ƒ Resolution

Linear axes < 0.5 nm

Rotational axes < 5 nm

ƒ Speed up to 1 mm/s

ƒ Drift < 1 nm/min

ƒ Cartesian movement

ƒ No backlash or reversal play

ƒ Coarse and fine displacement in one drive

Low Current Measurement

ƒ Noise: 20 fA @ 1 Hz

ƒ Insulation leakage current (probes): <50 fA / V

ƒ Insulation leakage current (sample): <150 fA / V

ƒ Signal conductor resistance: <5 Ω

ƒ Maximum voltage: 100 V

ƒ Maximum current: 100 mA

System features

ƒ Probing at FIB tilt for circuit edit applications

ƒ Non-magnetic design

ƒ Load lock compatible for fast cycle time

 

Probe-station对于要求稳定性很高的半导体厂测量电流用做探针台(Probe-station)时,PS系列的产品一般还要配备一个XYZ三方向的高精度移动子台及辅助增加稳定性的热温度控制。并且根据测量晶体管相关参数的需要配置LCT等相关软硬件配置(PW8)。

一般半导体厂家可以根据需要配置4个/6个/8个MM4微纳米操纵仪即PW8.4/PW6和PW8。

Technical specifications

Dimensions Prober Shuttle Platform

ƒ Diameter 140 mm

ƒ Height 10 mm

Substage

ƒ Travel X and Y 9 mm

ƒ Travel Z 0.7 mm

Probers

ƒ Travel X 4.5 mm

ƒ Travel Y 5 mm

ƒ Travel Z 90 deg

All axes

ƒ Resolution

Linear axes < 0.5 nm

Rotational axes < 8 nm

ƒ Speed up to 1 mm/s

ƒ Drift < 1 nm/min

ƒ Cartesian movement

ƒ No backlash or reversal play

ƒ Coarse and fine displacement in one drive

Measurement sensitivity

ƒ Noise: 20 fA @ 1 Hz

ƒ Insulation leakage current (probes): <50 fA / V

ƒ Insulation leakage current (sample): <150 fA / V

ƒ Signal conductor resistance: <5 Ω

ƒ Maximum voltage: 100 V

ƒ Maximum current: 100 mA

System features

ƒ All air side hardware mounted in 19” rack

ƒ Electronics rack outside of operator’s view

ƒ The entire system is controlled via the APT UI

ƒ Clean cable management from flange to rack

ƒ Probing at FIB tilt for circuit edit applications

ƒ Non-magnetic design

ƒ Ready for 7 nm and beyond

 

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