扫描电镜联用AFM
你有没有想过用扫描电子显微镜，快速获取3d 信息？Kleindiek 和 Nanosurf 为你提供了即插即用的改进解决方案。原子力显微镜(AFM和扫描电子显微镜(SEM)的结合开启了令人兴奋的新可能性。扫描电镜在微米和纳米范围内被广泛用于分析，AFM 技术对于研究不同材料的表面和特性以及纳米细节非常有用。 Kleindiek 纳米技术公司开发了一种超薄、紧凑和灵活的扫描仪，使得 AFM 可以在扫描电镜下进行。结合 Nanosurf 的 SPM 控制器和易于使用的控制软件，从扫描电镜检查的横向尺寸和材料的信息可以很容易地补充精确的地形和力的信息就地。这两组数据的独特和轻松可用性为现有工具带来了新的增值功能，并减少了实验周期时间，从而提高了研究吞吐量。
原子力显微镜系统小巧轻便，可以放入任何扫描电子显微镜，它甚至可以与你的SEM的样品交换仓（空气锁）兼容。
这个系统在空气中也能独立工作。
YOUR ADVANTAGES
3D information from simultaneous
SEM and AFM pictures
Notably compact (height 10 mm)
Simple to operate
Load-lock compatible
Extremely stable operation
Easy sample and tip exchange
without laser adjustment
Can be used in combination with
micromanipulators and other
in-situ and ex-vivo tools
Works in air and in SEM
Coarse positioner
• The ultra-flat three-axis manipulator with
unmatched stability and precision
• Operating range A 10 mm, B 80°, C 5 mm
• Piezo range A 1 µm, B 10 µm, C 1 µm
• Resolution A 0.25 nm, B 2.5 nm, C 0.25 nm
• Low drift 1 nm/min
• Reliable operation (one year endurance test)
• Fast pre-positioning by hand
• No backlash, creep or reversal play
• Fine and coarse displacement in one drive
A = left/right, B = up/down, C = in/out
AFM sensor
• Cantilever with integrated piezoresistive sensor
• Operates in contact mode with dynamic mode
available in the near future
• Length 400 µm
• Width 50 µm
• Height 4 to 5 µm
• Tip radius < 20 nm
• Tip height > 5 µm
• Tip force constant 2–4 N/m
• Maximum tip force 80 µN
• Resistance 500 to 650 Ω
• Sensitivity 3.1 × 10–3 mV/nm @ Vbridge = 2.5 V
AFM scanning unit
• Ultra-flat scanner with scan ranges up to 15 µm
in XY and 5 µm in Z
Shuttle platform
• SEM and FIB load-lock compatibility
• Quick and easy probe tip and sample exchange
• Total system height 9 mm
• Total system width 95 mm
• Maximum sample size 12 mm × 12 mm × 1 mm
• Weight 100 g
AFM software
• User-friendly control and imaging software
• Built-in post-processing and analysis capabilities
• Integrated lithography and scripting functions
SPM S200 controller
• 16-bit data acquisition with up to 16 lines/s
• Up to 2048 × 2048 scan area data point
• Up to 65536 spectroscopy data points
• Hardware sample tilt compensation
• 16-bit scanner drive signals
• One-wire connection to scanner
• USB 2.0 connection to computer
• Modular design allows future upgrades that
enable extended AFM measurement modes
• Power supply 90–240 V AC @ 50/60 Hz (100 W)
• Size 470 × 120 × 80 mm
• Weight 2.4 kg
